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Atmospheric-Pressure Plasma Sources For Polymer Surface Modification, Shujun Yang

Electrical & Computer Engineering Theses & Dissertations

Plasma processing is widely used in the microelectronics industry for deposition of thin films. It is also used in etching of semiconductors, metals and organic materials such as photoresists. In addition, plasmas are widely used to modify material surfaces. Plasma surface modification can improve the surface adhesion of polymeric materials, which can be used as insulating layers in multilayer semiconductor structures. In deposition and etching, relatively a large amount of material is added to or removed from the surface. In plasma surface modification, only the surface layer is changed in composition or structure, and no significant amount of material is …