Engineering Commons^™

Using Micro-Raman Spectroscopy To Assess Mems Si/Sio2 Membranes Exhibiting Negative Spring Constant Behavior, Lavern A. Starman, Ronald A. Coutu Jr.

Electrical and Computer Engineering Faculty Research and Publications

We introduce a novel micro-mechanical structure that exhibits two regions of stable linear positive and negative stiffness. Springs, cantilevers, beams and any other geometry that display an increasing return force that is proportional to the displacement can be considered to have a “Hookean” positive spring constant, or stiffness. Less well known is the opposite characteristic of a reducing return force for a given deflection, or negative stiffness. Unfortunately many simple negative stiffness structures exhibit unstable buckling and require additional moving components during deflection to avoid deforming out of its useful shape. In Micro-Electro-Mechanical Systems (MEMS) devices, buckling caused by stress …