Engineering Commons^™

Three-Dimensional Micromachined On-Chip Inductors For High Frequency Applications, Nimit Chomnawang

LSU Doctoral Dissertations

Demands for wireless communication are ever-escalating for consumer and military communication applications. The requirements of portability, more functionality and lower cost have been driving forces toward smaller, more sophisticated and flexible wireless devices with lower power consumption. To meet these requirements, monolithically integrated passive inductors with high Q-factors and high self-resonant frequencies are desirable. Q-factor and self-resonant frequency of an inductor are significantly degraded at high frequencies due to conductor ohmic loss, magnetically induced eddy current in the conductive substrate, and lower self-resonant frequency from capacitance between conductive substrate and conductors.
In this dissertation, novel three-dimensional arch-like solenoid and dome-shaped …