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Segmented Control Of Electrostatically Actuated Bimorph Micromirrors, Kullen W. Waggoner
Segmented Control Of Electrostatically Actuated Bimorph Micromirrors, Kullen W. Waggoner
Theses and Dissertations
Electrostatic actuating bimorph beams are a MEMS device that can be used to control arrays of small micromirrors for optical beam scanning. Previous research has demonstrated that creating high-angle deflection using long repeating arms of bimorph beams is possible. The current devices lack precise control and measurement of the mirror deflection. A solution to improve control and measurement is by using segmented bias channels to control separate portions of the actuation arm. The amount of mirror deflection will vary depending on which segments of the arm are actuated. This thesis discusses the results of FEA modeling and testing.