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Determination Of Phase Composition Of Sputtered Tantalum On Steel Substrates By Resistivity Measurements, Younes Abbassi

Theses

The objective of this thesis was to develop a method of distinguishing between alpha and beta phases of tantalum films on steel substrates, using the four-point probe resistivity measurements. While there is a large difference between resistivities of the two Ta phases, the problem is challenging because the measurements are influenced by the low resistivity of steel.

For reference, the resistivity measurements of tantalum coatings (1-20 μm) on silicon and silicon dioxide substrates were conducted first. The measured resistivities were related to the crystallographic phase composition of Ta, which has lower resistivity in bcc form, α-phase, (13.5 to 42 μΩcm), …