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Articles 9811 - 9840 of 12000
Full-Text Articles in Entire DC Network
In-Situ Film Thickness Measurements For Real-Time Monitoring And Control Of Advanced Photoresist Track Coating Systems, Richard N. Savage, Thomas E. Metz, Horace O. Simmons
In-Situ Film Thickness Measurements For Real-Time Monitoring And Control Of Advanced Photoresist Track Coating Systems, Richard N. Savage, Thomas E. Metz, Horace O. Simmons
Materials Engineering
This paper explores the methodologies of real-time measurement of photoresist film thickness on silicon wafers using multi-wavelength reflection interferometry. Reflected light from the wafer's surface, containing the interference profile, is collected in-situ via a fiber optic cable and film thickness is determined in real-time via a pattern recognition algorithm. The instrumentation used to make this measurement and its application toward optimizing track performance during spin-coating and back are discussed. Data demonstrating basic thickness versus spin-time and thickness versus bake-time profiles acquired on-line without process disruption are presented along with its utilization toward minimizing process set-up and machine qualification. Moreover, the …
Minimax-Optimal Stop Rules And Distributions In Secretary Problems, Theodore P. Hill, Ulrich Krengel
Minimax-Optimal Stop Rules And Distributions In Secretary Problems, Theodore P. Hill, Ulrich Krengel
Research Scholars in Residence
For the secretary (or best-choice) problem with an unknown number N of objects, minimax-optimal stop rules and (worst-case) distributions are derived, under the assumption that $N$ is a random variable with unknown distribution, but known upper bound n. Asymptotically, the probability of selecting the best object in this situation is of order of (log n)-1. For example, even if the only information available is that there are somewhere between 1 and 100 objects, there is still a strategy which will select the best item about one time in five.
In-Line Photoresist Thickness Monitor, Richard N. Savage, Tom W. Batchelder, Kenneth M. Sautter, Gary H. Memovich
In-Line Photoresist Thickness Monitor, Richard N. Savage, Tom W. Batchelder, Kenneth M. Sautter, Gary H. Memovich
Materials Engineering
An in-line photoresist thickness measuring device wherein a plurality of projection optical fibers are disposed over a wafer processing track for illuminating portions of a wafer as the wafer proceeds along the track. The light scattered back from each illuminated portion is detected by a corresponding plurality of pickup optical fibers and communicated to an optical fiber multiplexer. The multiplexer sequentially selects the optical signal from each pickup optical fiber and communicates the light from the selected pickup optical fiber to a spectrometer. The spectrometer simultaneously diffuses the scattered light into a plurality of light bands, each light band having …
Mustang Daily, November 30, 1990
Mustang Daily, November 30, 1990
Cal Poly Student Newspaper
Student newspaper of California Polytechnic State University, San Luis Obispo, CA.
Mustang Daily, November 29, 1990
Mustang Daily, November 29, 1990
Cal Poly Student Newspaper
Student newspaper of California Polytechnic State University, San Luis Obispo, CA.
Mustang Daily, November 28, 1990
Mustang Daily, November 28, 1990
Cal Poly Student Newspaper
Student newspaper of California Polytechnic State University, San Luis Obispo, CA.
Mustang Daily, November 20, 1990
Mustang Daily, November 20, 1990
Cal Poly Student Newspaper
Student newspaper of California Polytechnic State University, San Luis Obispo, CA.
Mustang Daily, November 14, 1990
Mustang Daily, November 14, 1990
Cal Poly Student Newspaper
Student newspaper of California Polytechnic State University, San Luis Obispo, CA.
Mustang Daily, November 8, 1990
Mustang Daily, November 8, 1990
Cal Poly Student Newspaper
Student newspaper of California Polytechnic State University, San Luis Obispo, CA.
Mustang Daily, November 7, 1990
Mustang Daily, November 7, 1990
Cal Poly Student Newspaper
Student newspaper of California Polytechnic State University, San Luis Obispo, CA.
Mustang Daily, November 6, 1990
Mustang Daily, November 6, 1990
Cal Poly Student Newspaper
Student newspaper of California Polytechnic State University, San Luis Obispo, CA.
Mustang Daily, November 5, 1990
Mustang Daily, November 5, 1990
Cal Poly Student Newspaper
Student newspaper of California Polytechnic State University, San Luis Obispo, CA.
Mustang Daily, November 2, 1990
Mustang Daily, November 2, 1990
Cal Poly Student Newspaper
Student newspaper of California Polytechnic State University, San Luis Obispo, CA.
Mustang Daily, October 25, 1990
Mustang Daily, October 25, 1990
Cal Poly Student Newspaper
Student newspaper of California Polytechnic State University, San Luis Obispo, CA.
Mustang Daily, October 24, 1990
Mustang Daily, October 24, 1990
Cal Poly Student Newspaper
Student newspaper of California Polytechnic State University, San Luis Obispo, CA.
Mustang Daily, October 23, 1990
Mustang Daily, October 23, 1990
Cal Poly Student Newspaper
Student newspaper of California Polytechnic State University, San Luis Obispo, CA.
Mustang Daily, October 18, 1990
Mustang Daily, October 18, 1990
Cal Poly Student Newspaper
Student newspaper of California Polytechnic State University, San Luis Obispo, CA.
Mustang Daily, October 17, 1990
Mustang Daily, October 17, 1990
Cal Poly Student Newspaper
Student newspaper of California Polytechnic State University, San Luis Obispo, CA.
Mustang Daily, October 16, 1990
Mustang Daily, October 16, 1990
Cal Poly Student Newspaper
Student newspaper of California Polytechnic State University, San Luis Obispo, CA.
Mustang Daily, October 15, 1990
Mustang Daily, October 15, 1990
Cal Poly Student Newspaper
Student newspaper of California Polytechnic State University, San Luis Obispo, CA.
Mustang Daily, October 11, 1990
Mustang Daily, October 11, 1990
Cal Poly Student Newspaper
Student newspaper of California Polytechnic State University, San Luis Obispo, CA.
Mustang Daily, October 9, 1990
Mustang Daily, October 9, 1990
Cal Poly Student Newspaper
Student newspaper of California Polytechnic State University, San Luis Obispo, CA.
Academic Senate - Meeting Minutes, 10/2/1990, Academic Senate
Academic Senate - Meeting Minutes, 10/2/1990, Academic Senate
Academic Senate Minutes
No abstract provided.
Brahma Bull, Mary Sternberg
Animal Liberation As A Valid Response To Structural Violence, Amy Liszt
Animal Liberation As A Valid Response To Structural Violence, Amy Liszt
Between the Species
No abstract provided.
Response, Susan Finsen
Biological Holism And The Evolution Of Ethics, Kristin Shrader-Frechette
Biological Holism And The Evolution Of Ethics, Kristin Shrader-Frechette
Between the Species
No abstract provided.
Mustang Daily, October 1, 1990
Mustang Daily, October 1, 1990
Cal Poly Student Newspaper
Student newspaper of California Polytechnic State University, San Luis Obispo, CA.
Critical Notice Of Morals, Reason, And Animals, James Lindemann Nelson
Critical Notice Of Morals, Reason, And Animals, James Lindemann Nelson
Between the Species
No abstract provided.