Physical Sciences and Mathematics Commons^™

Modeling And Experimental Verification Of Growth Of An Axisymmetric Cylindrical Rod By Three-Dimensional Laser-Induced Chemical Vapor Deposition, Qing Chen

Doctoral Dissertations

Three-dimensional laser-induced chemical vapor deposition (3D-LCVD) is a recently developed micro-manufacturing process that holds great potential for the production of complex microstructures with high aspect ratio. A laser beam is focused through a vacuum chamber window onto a movable substrate. The heat from the laser at or near the focal spot on the substrate induces the decomposition reaction of precursor gas in the chamber. As a result, solid-phase reaction products are deposited on the substrate to form the microstructure. In this dissertation, a numerical model is developed for simulating kinetically-limited growth of an axisymmetric cylindrical rod by pre-specifying the surface …