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Emissivity Measurements And Modeling Of Silicon Related Materials And Structures, Sufian Abedrabbo

Dissertations

The objective of this dissertation is to investigate the major issues concerning applications of pyrometry for applications in rapid thermal processing (RTP) of silicon related materials. The research highlights of this work are:

Establishment of spectral ernissometry as a novel, reliable and reproducible technique for:

Determination of wavelength and temperature dependent reflectivity, transmissivity, emissivity and temperature, simultaneously, of silicon related materials and structures. The emissometer operates in the wavelength range of 1-20mm and temperature range of 300-1200K. The analysis of the influence of morphological effects on the radiative properties by measurement of (a) front-smooth incidence versus backside-rough incidence of singleside …