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Full-Text Articles in Physical Sciences and Mathematics
Deviations From Bulk Transport Measurements In Semi-Insulating Gaas, N. C. Halder, David C. Look
Deviations From Bulk Transport Measurements In Semi-Insulating Gaas, N. C. Halder, David C. Look
Physics Faculty Publications
Because of the high bulk resistivity of semi‐insulating GaAs, surface or near‐surface effects can change the apparent magnitudes of resistivity, mobility, and carrier concentration. We consider the following causes: (1) above‐surface conduction, such as that due to impurities in a porous oxide; (2) subsurface conduction, due to sawing and polishing damage; (3) tunneling conduction in surface states; and (4) changes in near‐surface conduction due to the modification of surface potential by surface states or absorbates. The most important of these effects appear to be subsurface damage and surface potential changes.
Hall-Effect Depletion Corrections In Ion-Implanted Samples: Si29 In Gaas, David C. Look
Hall-Effect Depletion Corrections In Ion-Implanted Samples: Si29 In Gaas, David C. Look
Physics Faculty Publications
The sheet free‐carrier concentration in a thin, conducting layer on an insulating substrate is lower than the net, sheet‐dopant concentration because of free‐carrier depletion in the surface and interface regions. Here we develop an algorithm to give the true, net sheet‐donor concentration from the measured sheet‐Hall concentration under the assumption of a Gaussian donor profile, which is usually sufficiently accurate for ion‐implanted samples. Correction curves are generated for Si29 ions implanted into GaAs at energies of 60, 100, 130, 150, and 200 keV, and at doses of 1×1011–2×1014 ions/cm2. Also, the …
Silicon Crystallite Formation In Ion-Implanted Quartz, U. B. Ramabadran, H. E. Jackson, Gary C. Farlow
Silicon Crystallite Formation In Ion-Implanted Quartz, U. B. Ramabadran, H. E. Jackson, Gary C. Farlow
Physics Faculty Publications
Rapid thermally annealed silicon‐implanted x‐cut α‐quartz samples have been examined by Rutherford backscattering and Raman microprobe spectroscopy. The data indicate that the silicon has diffused at 1200 °C to form a buried layer of crystallites of size 1–10 μm. The crystallites are preferentially oriented and under substantial stress.
Uniformity Of 3-In, Semi-Insulating, Vertical-Gradient-Freeze Gaas Wafers, David C. Look, D. C. Walters, M. G. Mier, J. S. Sewell, J. S. Sizelove, A. Akselrad, J. E. Clemans
Uniformity Of 3-In, Semi-Insulating, Vertical-Gradient-Freeze Gaas Wafers, David C. Look, D. C. Walters, M. G. Mier, J. S. Sewell, J. S. Sizelove, A. Akselrad, J. E. Clemans
Physics Faculty Publications
We have evaluated the uniformity in [EL2], dislocation (or etch‐pit) density (EPD), resistivity, mobility, and carrier concentration for 3‐in., semi‐insulating GaAs wafers grown by the vertical‐gradient‐freeze (VGF) technique. Although slight W or U patterns were observed in [EL2] and EPD along the 〈110〉 directions, for the first time, nevertheless the overall uniformity was excellent, and comparable to that in the best In‐doped and whole‐boule‐annealed ingots grown by the liquid‐encapsulated Czochralski (LEC) technique. Based on results from implant‐activation studies on LEC wafers, it is estimated that the measured nonuniformities in EPD and [EL2] for the VGF wafers would contribute only about …
Determination Of Shallow Minority-Acceptor Concentration In Multiply Doped Silicon, Gust Bambakidis, G. J. Brown
Determination Of Shallow Minority-Acceptor Concentration In Multiply Doped Silicon, Gust Bambakidis, G. J. Brown
Physics Faculty Publications
A method is presented, based on photothermal ionization spectroscopy (PTIS), for determining the shallow minority‐acceptor concentration in multiply doped silicon, over the concentration range 1013/cm3–1015/cm3. The method is an extension of a model developed previously for the PTIS response in a multiply doped semiconductor, which accounts for the experimentally observed change in signature, from negative to positive, of the lower‐energy lines of the deeper acceptor as the temperature is increased. It uses a calculated curve of the dependence on the shallow‐acceptor concentration of the temperature at which the change in …
Photodissociation Of Co In The Thermosphere Of Venus, Jane L. Fox
Photodissociation Of Co In The Thermosphere Of Venus, Jane L. Fox
Physics Faculty Publications
Recent investigations of CO photoabsorption demonstrate that photodissociation longward of the ionization threshold at 88.5 nm occurs primarily through line absorptions rather than continuous processes. We have constructed high resolution photoabsorption cross sections for CO at rotational temperatures near 250 K from the improved data on dissociating transitions. We examine the effects of the new cross sections on the rate of solar photodissociation of CO in the thermosphere of Venus and compare the results to values obtained with the lower resolution cross sections available previously. We find that the photodissociation profile peaks slightly higher in the atmosphere and the peak …
A New Technique For Whole-Wafer Etch-Pit Density Mapping In Gaas, David C. Look, D. C. Walters, J. S. Sewell, S. C. Dudley, M. G. Mier, J. S. Sizelove
A New Technique For Whole-Wafer Etch-Pit Density Mapping In Gaas, David C. Look, D. C. Walters, J. S. Sewell, S. C. Dudley, M. G. Mier, J. S. Sizelove
Physics Faculty Publications
The pits formed on an etched GaAs surface, due to the anisotropic etching around dislocations, are efficient light scatterers, and thus reduce transmission. We have derived a quantitative relationship between the fractional transmission and the etch‐pit density (EPD) and have shown that the same absorption apparatus which is commonly used to obtain a whole‐wafer [EL2] map can also be used to generate an EPD map. The technique is verified by comparing the fractional transmission with the actual EPD count at 166 points on a three‐inch, low‐pressure, liquid‐encapsulated Czochralski wafer. Also, [EL2] and EPD maps, with more than 3500 points each, …