Physical Sciences and Mathematics Commons^™

Two-Dimensional Low-Resistance Contacts For High Performance Wse2 And Mos2 Transistors, Hsun Jen Chuang

Wayne State University Dissertations

ABSTRACT

TWO-DIMENSIONAL LOW-RESISTANCE CONTACTS FOR HIGH PERFORMANCE WSe2 and MoS2, TRANSISTORS

by

Hsun-jen Chuang

May 2016

Advisor: Dr. Zhixian Zhou

Major: Physics

Degree: Doctor of Philosophy

Two-dimensional layered materials beyond graphene such as transition metal dichalcogenides (TMDs) have attracted a lot of interests due to their superior property in many aspects. In this work, I am focusing on two TMD materials: WSe2 and MoS2. The main objective this work is to develop novel approaches to fabricating low-resistance ohmic contacts to TMDs for low power, high performance electronic applications. First, we used graphene as electrical contacts for WSe2 field-effect transistor with …

Dense Periodical Patterns In Photonic Devices: Technology For Fabrication And Device Performance, Sabarish Chandramohan

Wayne State University Dissertations

For the fabrication, focused ion beam parameters are investigated to successfully fabricate dense periodical patterns, such as gratings, on hard transition metal nitride such as zirconium nitride. Transition metal nitrides such as titanium nitride and zirconium nitride have recently been studied as alternative materials for plasmonic devices because of its plasmonic resonance in the visible and near-infrared ranges, material strength, CMOS compatibility and optical properties resembling gold. Coupling of light on the surface of these materials using sub-micrometer gratings gives additional capabilities for wider applications. Here we report the fabrication of gratings on the surface of zirconium nitride using gallium …