Physical Sciences and Mathematics Commons^™

Designs And Reliability Evaluations Of A Scattered Light Measurement System, Kang-Min Lee

Graduate Theses - Physics and Optical Engineering

The purpose of my work was to develop an in-plane stray light measurement system having the advantage of being easily applicable in both motion control and optical configurations. First of all, mechanical designs were conducted based on both 3D modeling and structural analysis through a finite element method (FEM). Optical configurations for both the incident source and the detector were designed to achieve minimum observed source convergence angle of the system. The control panel and micro stepping system were programmed for automated measurement. Finally, the designed system was calibrated and aligned. In order to evaluate the system reliability for scatter …