Physical Sciences and Mathematics Commons^™

Scatterometry Of 50 Nm Half Pitch Features, Ruichao Zhu

Optical Science and Engineering ETDs

Metrology technologies are an essential adjunct to Integrated Circuit (I.C.) Semiconductor manufacturing. Scatterometry, an optical metrology, was chosen to measure 50 nm half pitch feature structures. A bread-board scatterometry system has been assembled to provide a non-contact, non-destructive, accurate and flexible measurement. A real-time, on-line scatterometry system has also been demonstrated and proven to provide a high throughput measurement.

Three different types of samples have been measured using the scatterometry setup. The wire-grid polarizer (WGP) sample has been made by Jet and Flash Nanoimprint Lithography with ~100 nm pitch and ~50 nm wide ~200 nm tall Al gratings on fused …

High Power Optically Pumped Semiconductor Lasers For Sodium Guidestar Applications, Shawn W. Hackett

Optical Science and Engineering ETDs

Optically pumped semiconductor lasers (OPSLs) are shown to provide a much more compact and less expensive source for illumination of the sodium layer of the mesosphere for use as a sodium laser guidestar via single and two photon excitation schemes. This represents a revolution in laser guidestar technology as the cost, size, and power requirements for a laser guidestar system are shown to have been decreased by an order of magnitude with guidestar performance shown to be similar to previous sources. Sodium laser guidestar sources for broadband simultaneous illumination of multiple lines are developed and simulated. Simulations are then compared …