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Series

2009

Physics Faculty Publications

Plasma materials processing

Articles 1 - 2 of 2

Full-Text Articles in Physical Sciences and Mathematics

Metal Contacts On Bulk Zno Crystal Treated With Remote Oxygen Plasma, Z-Q. Fang, B. Claflin, David C. Look, Y. F. Dong, L. Brillson May 2009

Metal Contacts On Bulk Zno Crystal Treated With Remote Oxygen Plasma, Z-Q. Fang, B. Claflin, David C. Look, Y. F. Dong, L. Brillson

Physics Faculty Publications

To study the quality of thin metal/ZnO Schottky contacts (SCs), temperature-dependent current-voltage (I-V), capacitance-voltage, deep level transient spectroscopy, and photoluminescence measurements were performed using bulk, vapor-phase ZnO, treated by remote oxygen plasma (ROP). Au/ZnO and Pd/ZnO contacts on both O and Zn faces are compared as a function of the ROP processing sequence and duration. We find that (i) as the duration of ROP treatment increases from 2 to 4 h, Au/ZnO contacts on the Zn face, deposited before ROP treatment, become rectifying, while those on the O face remain Ohmic; (ii) with long-term ROP …


Polarity-Related Asymetry At Zno Surfaces And Metal Interfaces, Y. F. Dong, Z-Q. Fang, David C. Look, Daniel R. Doutt, M. J. Hetzer, L. J. Brillson May 2009

Polarity-Related Asymetry At Zno Surfaces And Metal Interfaces, Y. F. Dong, Z-Q. Fang, David C. Look, Daniel R. Doutt, M. J. Hetzer, L. J. Brillson

Physics Faculty Publications

Clean ZnO (0001) Zn- and (000(/1)) O-polar surfaces and metal interfaces have been systematically studied by depth-resolved cathodoluminescence spectroscopy, photoluminescence, current-voltage and capacitance-voltage measurements, and deep level transient spectroscopy. Zn-face shows higher near band edge emission and lower near surface defect emission. Even with remote plasma decreases of the 2.5 eV near surface defect emission, (0001)-Zn face emission quality still exceeds that of (000(/1))-O face. The two polar surfaces and corresponding metal interfaces also present very different luminescence evolution under low-energy electron beam irradiation. Ultrahigh vacuum-deposited Au and Pd diodes on as-received and O2/He plasma-cleaned surfaces display not …