Physical Sciences and Mathematics Commons^™

Deep Traps In Algan/Gan Heterostructures Studied By Deep Level Transient Spectroscopy: Effect Of Carbon Concentration In Gan Buffer Layers, Z-Q. Fang, B. Claflin, David C. Look, D. S. Green, R. Vetury

Physics Faculty Publications

Electrical properties, including leakage currents, threshold voltages, and deep traps, of AlGaN/GaN heterostructure wafers with different concentrations of carbon in the GaN buffer layer, have been investigated by temperature dependent current-voltage and capacitance-voltage measurements and deep level transient spectroscopy (DLTS), using Schottky barrier diodes (SBDs). It is found that (i) SBDs fabricated on the wafers with GaN buffer layers containing a low concentration of carbon (low-[C] SBD) or a high concentration of carbon (high-[C] SBD) have similar low leakage currents even at 500 K; and (ii) the low-[C] SBD exhibits a larger (negative) threshold voltage than the high-[C] SBD. Detailed …