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Syntheses And Reactions Of Early Transition Metal Amidinate Compounds, Adam Christopher Lamb
Syntheses And Reactions Of Early Transition Metal Amidinate Compounds, Adam Christopher Lamb
Doctoral Dissertations
Homoleptic Groups 4 and 5 metal amide compounds have been used as precursors in CVD/ALD processes to make microelectronic metal oxide thin films. These compounds are often very air sensitive. Ancillary ligands such as amidinates have been used to reduce their air sensitivity and to make their handling easier. Reactions of amidinates with dioxygen and water have thus been used to make metal oxide thin films. Studies of these reactions are important in order to make better precursors and purer thin films. This dissertation focuses on the following areas: (a) Syntheses of zirconium and Group 5 amidinate amides; (b) Studies …
Syntheses, Characterization And Reactions Of Early Transition Metal Guanidinate And Imide Compounds, Bhavna Sharma
Syntheses, Characterization And Reactions Of Early Transition Metal Guanidinate And Imide Compounds, Bhavna Sharma
Doctoral Dissertations
Early transition metal compounds and their reactions have been widely used in catalysis and preparation of advanced materials such as metal oxides in microelectronic devices. Studies of the compounds and their reactions provide a fundamental understanding of chemistry of the compounds and are critical to their applications. This dissertation focuses on the following areas: (a) Reactions of Group 4 amide guanidinates with dioxygen or water; (b) Formation of a tantalum imide complex through an unusual α [alpha]-SiMe3 [trimethylsilyl] abstraction. Reactions of the amide guanidinates with either dioxygen or water yield products that are identified to be dimers and polymers …