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Doctoral Dissertations

2005

Chemical vapor deposition

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Integrated Modeling And Parallel Computation Of Laser-Induced Axisymmetric Rod Growth, Hong Lan Apr 2005

Integrated Modeling And Parallel Computation Of Laser-Induced Axisymmetric Rod Growth, Hong Lan

Doctoral Dissertations

To fully investigate a pyrolytic Laser-induced chemical vapor deposition (LCVD) system for growing an axisymmetric rod, a novel integrated three-dimensional mathematical model was developed not only to describe the heat transport in the deposit and substrate, but also to simulate the gas-phase in the heated reaction zone and its effect on growth rate. The integrated model consists of three components: the substrate, rod, and gas-phase domains. Each component is a separate model and the three components are dynamically integrated into one model for simulating the iterative and complex process of rod deposition.

The gas-phase reaction is modeled by the gas-phase …