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Transmission Electron Microscopy Analysis Of Silicon-Doped Beta-Gallium Oxide Films Grown By Pulsed Laser Deposition, Cynthia Thomason Bowers

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Due to the large band gap of β-Ga2O3 and recent improvements toward high quality native substrates and the ability to shallow dope epitaxial β-Ga2O3 it is an attractive material for applications in power electronic devices. Such devices require advances in the areas of thin film growth and carrier concentration control to deliver high mobility films appropriate for the device structures. Transmission electron microscopy (TEM) analysis can provide information concerning doping, crystal structure, and internal strain which will be valuable to assess the role of defects and impurities on the transport properties for feedback to optimize the bulk and epitaxial growth …