Physical Sciences and Mathematics Commons^™

Magnetron Sputtering Of Nb3Sn For Srf Cavities, Md. N. Sayeed, H. Elsayed-Ali, G. V. Eremeev, M. J. Kelley, U. Pudasaini, C. E. Reece

Electrical & Computer Engineering Faculty Publications

Nb₃Sn is a potential candidate for surface material of SRF cavities since it can enable the cavity to operate at higher temperatures with high quality factor and at an increased accelerating gradient. Nb-Sn films were deposited using magnetron sputtering of individual Nb and Sn targets onto Nb and sapphire substrates. The as-deposited films were annealed at 1200 °C for 3 hours. The films were characterized for their structure by X-ray Diffraction (XRD), morphology by Field Emission Scanning Electron Microscopy (FESEM), and composition by Energy Dispersive X-ray Spectroscopy (EDS) and Time of Flight Secondary Ion Mass Spectrometry (ToF-SIMS). The …