Physical Sciences and Mathematics Commons^™

Raman Spectroscopic Study Of The Formation Of T-Mosi2 From Mo/Si Multilayers, Ming Cai, David D. Allred, A. Reyes-Mena

Faculty Publications

We have used Raman spectroscopy, large- and small-angle x-ray diffraction spectroscopy of sputter-deposited, vacuum-annealed, soft x-ray Mo/Si thin-film multilayers to study the physics of silicide formation. Two sets of multilayer samples with d-spacing 8.4 and 2.0 nm have been studied. Annealing at temperatures above 800 °C causes a gradual formation of amorphous MoSi2 interfaces between the Si and Mo layers. The transition from amorphous to crystalline MoSi2 is abrupt. The experimental results indicate that nucleation is the dominant process for the early stage and crystallization is the dominant process after nucleation is well advanced. In the thicker multilayer, a portion …