Physical Sciences and Mathematics Commons^™

Mems Approaches In Infrared Imaging, George Papavieros

Theses

The design and performance simulation of a novel Microelectromechanical System (MEMS) based infrared detector, that utilizes coefficient of thermal expansion, is discussed. The detector design uses a variety of thermal expansion coefficient materials, including alloys which are connected to ambient through a thermal conducting bridge. The thermal flux, due to the incident IR photons, is determined by the Extended Blackbody Calculator (BBC). These materials are physically interfaced with different types of piezoelectric resonators, constructed using the MEMS process. The expansion due to heating, applies stress to the piezoelectric resonator material. This thermally induced stress forces the resonator to alter its …