Physical Sciences and Mathematics Commons^™

Novel Concepts In Semiconductor Disk Lasers, Zhou Yang

Optical Science and Engineering ETDs

Optically-pumped semiconductor disk lasers (SDLs) have received much attention in recent years for a myriad of applications requiring intracavity access, good beam quality, wavelength versatility, and high output powers. The traditional scheme of these lasers feature a semiconductor distributed Bragg reflector (DBR) integrated with the active region, together forming an active mirror in an external free-space cavity. The active mirror component is fabricated by either epitaxial growth or post-growth processing. This places certain restrictions on SDL design, as material system choices become limited. It further viii hinders laser performance with regard to its thermal management and laser bandwidth (tuning range). …

Scatterometry Of 50 Nm Half Pitch Features, Ruichao Zhu

Optical Science and Engineering ETDs

Metrology technologies are an essential adjunct to Integrated Circuit (I.C.) Semiconductor manufacturing. Scatterometry, an optical metrology, was chosen to measure 50 nm half pitch feature structures. A bread-board scatterometry system has been assembled to provide a non-contact, non-destructive, accurate and flexible measurement. A real-time, on-line scatterometry system has also been demonstrated and proven to provide a high throughput measurement.

Three different types of samples have been measured using the scatterometry setup. The wire-grid polarizer (WGP) sample has been made by Jet and Flash Nanoimprint Lithography with ~100 nm pitch and ~50 nm wide ~200 nm tall Al gratings on fused …