Physical Sciences and Mathematics Commons^™

Plasma Processing Of Superconducting Radio Frequency Cavities, Janardan Upadhyay

Physics Theses & Dissertations

The development of plasma processing technology of superconducting radio frequency (SRF) cavities not only provides a chemical free and less expensive processing method, but also opens up the possibility for controlled modification of the inner surfaces of the cavity for better superconducting properties. The research was focused on the transition of plasma etching from two dimensional flat surfaces to inner surfaces of three dimensional (3D) structures. The results could be applicable to a variety of inner surfaces of 3D structures other than SRF cavities. Understanding the Ar/Cl₂ plasma etching mechanism is crucial for achieving the desired modification of Nb …