Physical Sciences and Mathematics Commons^™

Plasma Polymerization Investigated By The Substrate Temperature Dependence., H. Yasuda, Cheng Wang

Chemistry Faculty Research & Creative Works

In the reported experiments, plasma polymerization of tetrafluoroethylene (TFE), perfluoro-2-butyl-tetrahydrofuran (PFBTHF), ethylene, and styrene were investigated in various combinations of monomer flow rates and discharge wattages for the substrate temperature range of minus 50 to 80 degree C. The polymer deposition rates can be generally expressed by k//o equals Ae** minus **b**t, where k//o is the specific deposition rate given by k//o equals (deposition rate)/(mass flow rate of monomer), A is the preexponential factor representing the extrapolated value of k//o at zero absolute temperature, and b is the temperature-dependence coefficient. It was found that the value of b is not …