Physical Sciences and Mathematics Commons^™

Microdischarge Arrays, Wenhui Shi

Electrical & Computer Engineering Theses & Dissertations

Microhollow cathode discharges (MHCDs) are DC or pulsed gas discharges between two electrodes, separated by a dielectric, and containing a concentric hole. The diameter of the hole, in this hollow cathode configuration, is in the hundred-micrometer range. MHCDs satisfy the two conditions necessary for an efficient excimer radiation sources: (1) high energy electrons which are required to provide a high concentration of excited or ionized rare gas atoms; (2) high pressure operation which favors excimer formation (a three-body process). Flat panel excimer sources require parallel operation of MHCDs. Based on the current-voltage characteristics of MHCD discharges, which have positive slopes …