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Physical Sciences and Mathematics Commons

Open Access. Powered by Scholars. Published by Universities.®

Computer Engineering

2018

Theses: Doctorates and Masters

RF sputtering

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Development, Manufacture And Application Of A Solid-State Ph Sensor Using Ruthenium Oxide, Wade Lonsdale Jan 2018

Development, Manufacture And Application Of A Solid-State Ph Sensor Using Ruthenium Oxide, Wade Lonsdale

Theses: Doctorates and Masters

The measurement of pH is undertaken frequently in numerous settings for many applications. The common glass pH probe is almost ideal for measuring pH, and as such, it is used almost ubiquitously. However, glass is not ideal for all applications due to its relatively large size, fragility, need for recalibration and wet-storage. Therefore, much research has been undertaken on the use of metal oxides as an alternative for the measurement of pH.

Here, a solid-state potentiometric pH sensor is developed using ruthenium metal oxide (RuO2). Initially, pH sensitive RuO2 electrodes were prepared by deposition with radio frequency magnetron sputtering (RFMS) …