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Missouri University of Science and Technology
Chemical and Biochemical Engineering Faculty Research & Creative Works
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Full-Text Articles in Physical Sciences and Mathematics
Plasma Polymerization Of Tetrafluoroethylene. Iii. Capacitive Audio Frequency (10 Khz) And Ac Discharge, N. (Nicholas) C. Morosoff, H. Yasuda, E. S. Brandt, C. N. Reilley
Plasma Polymerization Of Tetrafluoroethylene. Iii. Capacitive Audio Frequency (10 Khz) And Ac Discharge, N. (Nicholas) C. Morosoff, H. Yasuda, E. S. Brandt, C. N. Reilley
Chemical and Biochemical Engineering Faculty Research & Creative Works
The plasma polymerization of tetrafluoroethylene (TFE) is studied in a capacitively coupled system with internal electrodes using a 10 kHz (af) and a 60 Hz (ac) source. The emphasis is on identifying conditions that are compatible with continuous coating of plasma polymer on a substrate moving through the center of the interelectrode gap. Operation at a pressure below 100 mTorr is most favorable for deposition of a substantial portion of the plasma polymer on this substrate. Plasma polymer deposited in this way is characterized by ESCA and by deposition rate data and compared to that deposited using rf power in …
Plasma Polymerization Of Tetrafluoroethylene. Ii. Capacitive Radio Frequency Discharge, N. (Nicholas) C. Morosoff, H. Yasuda, E. S. Brandt, C. N. Reilley
Plasma Polymerization Of Tetrafluoroethylene. Ii. Capacitive Radio Frequency Discharge, N. (Nicholas) C. Morosoff, H. Yasuda, E. S. Brandt, C. N. Reilley
Chemical and Biochemical Engineering Faculty Research & Creative Works
The plasma polymerization of tetrafluoroethylene (TFE) is studied in a capacitively coupled system with internal electrodes using radio frequency (13.56 MHz) power. The emphasis is on identifying conditions that are compatible with continuous coating of plasma polymer on a substrate moving through the center of the interelectrode gap. At high pressure (500 mTorr), deposition of plasma polymer is primarily on the electrodes rather than on a substrate placed midway between electrodes. Glow is observed in only part of the interelectrode gap at low powers and fills the gap only at high power levels. The use of a magnetic field effects …