Physical Sciences and Mathematics Commons^™

Use Of Raman Spectroscopy In Characterizing Soft X-Ray Multilayers: Tools In Understanding Structure And Interfaces, Ming Cai, Qi Wang, David D. Allred, Larry V. Knight, Dorian M. Hatch, A. Reyes-Mena, Guizhong Zhang

Faculty Publications

Our group is studying the structure and interfaces of soft x-ray multilayers by various techniques including x-ray diffraction and Raman spectroscopy. Raman spectroscopy is particularly useful since it is sensitive to the identity of individual bonds and thus can potentially characterize the abruptness of interfaces in multilayers. Blocking interfacial mixing is very important in achieving and maintaining high reflectivity. We report our studies of the as-deposited and postannealed structure of Mo/Si and W/C multilayers. The Mo/Si system is probably the most widely studied multilayer currently because of its potential applications for soft x-ray projection lithography for the range of 13 …