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Full-Text Articles in Physical Sciences and Mathematics
Scandium Oxide Thin Films And Their Optical Properties In The Extreme Ultraviolet, Guillermo Antonio Acosta
Scandium Oxide Thin Films And Their Optical Properties In The Extreme Ultraviolet, Guillermo Antonio Acosta
Theses and Dissertations
This study reports on the physical and optical characterization of scandium oxide thin films. Thin films of scandium oxide, 20-40 nm thick, were deposited on silicon wafers, quartz slides, and silicon photodiodes by reactively sputtering scandium in an oxygen environment. These samples were characterized using ellipsometry, high-resolution transmission electron microscopy, scanning transmission electron microscopy, and energy dispersive x-ray analysis. A 28.46 nm thick scandium oxide thin film was measured in the Extreme Ultraviolet (EUV) from 2.7 to 50 nm (459.3 to 24.8 eV) using synchrotron radiation at the Advanced Light Source Beamline 6.3.2 at the Lawrence Berkeley National Laboratory. In …
Extreme Ultraviolet Polarimetry With Laser-Generated High-Order Harmonics, Nicole Brimhall
Extreme Ultraviolet Polarimetry With Laser-Generated High-Order Harmonics, Nicole Brimhall
Theses and Dissertations
We developed an extreme ultraviolet (EUV) polarimeter, which employs laser-generated high-order harmonics as the light source. This relatively high-flux directional EUV source has available wavelengths between 8 nm and 62 nm and easily rotatable linear polarization. The polarimeter will aid researchers at BYU in characterizing EUV thin films and improving their understanding of materials for use in EUV optics. This first-time workhorse application of laser high harmonics enables polarization-sensitive reflection measurements not previously available in the EUV. We have constructed a versatile positioning system that places harmonics on the microchannel plate detector with an accuracy of 0.3 mm, which allows …