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Journal

1993

Nuclear microprobe

Articles 1 - 4 of 4

Full-Text Articles in Life Sciences

Quantitative Elemental Mapping Of Biomedical Specimens Using The Nuclear Microprobe., Jan Pallon, John Knox Dec 1993

Quantitative Elemental Mapping Of Biomedical Specimens Using The Nuclear Microprobe., Jan Pallon, John Knox

Scanning Microscopy

Quantitative and structural elemental information is available from the nuclear microprobe through a time consuming fit of the (X-ray) spectrum at each point. An alternative technique is proposed which greatly shortens the analysis procedure and allows an increased number of samples to be processed. The method discussed here is to create elemental maps which, when they are divided by the charge/pixel and multiplied by a scaling factor, will form quantitative maps. The scaling factors are obtained from a calibration procedure comparing a large number of fitted X-ray spectra with the corresponding contents of selected energy windows. The technique also allows …


Micro-Pixe (Particle Induced X-Ray Emission) Analysis Of Aluminum In Rat-Liver Using Mev Heavy Ion Microprobes, Yuji Horino, Yoshiaki Mokuno, Atsushi Kinomura, Kanenaga Fujii, Sakae Yumoto Dec 1993

Micro-Pixe (Particle Induced X-Ray Emission) Analysis Of Aluminum In Rat-Liver Using Mev Heavy Ion Microprobes, Yuji Horino, Yoshiaki Mokuno, Atsushi Kinomura, Kanenaga Fujii, Sakae Yumoto

Scanning Microscopy

Heavy ion microprobes (HIM) such as 3 MeV Si2+ and 3 MeV p2+ have been applied to the elemental analysis by PIXE (proton-induced X-ray emission). It was found that silicon and phosphorus microprobes have several times higher sensitivity for aluminum Kα X-rays than 2 MeV proton microprobes, and detection limits were more favorable in a phosphorus microprobe. Using a 3 MeV p2+ microprobe, the liver of a rat, which had been injected with aluminum-lactate, was investigated and it was found that aluminum segregates in areas with a dimension of about 10 μm. These areas could hardly be …


Local Susceptibility Against Soft Errors In Dynamic Random Access Memories (Drams) Analyzed By Nuclear Microprobes, H. Sayama, M. Takai, H. Kimura, Y. Ohno, S. Satoh Sep 1993

Local Susceptibility Against Soft Errors In Dynamic Random Access Memories (Drams) Analyzed By Nuclear Microprobes, H. Sayama, M. Takai, H. Kimura, Y. Ohno, S. Satoh

Scanning Microscopy

A novel evaluation technique for soft errors in Mbit DRAMs (dynamic random access memories) has been developed using a 400 keV proton microprobe system. This technique, which is called soft error mapping, consists of a bit-state mapping image and a secondary electron mapping image, and can reveal the correlation between the incident position of protons and susceptibility against soft errors in DRAMs. Soft errors are found to be induced by proton incidence at 400 keV within about 6 μm around the memory cell in the case of DRAMs with a conventional well. The susceptible area against proton incidence is much …


Nuclear Microprobe For Integrated Circuit Process Inspection, Mikio Takai, Ryoh Mimura, Hiroshi Sawaragi, Ryuso Aihara Aug 1993

Nuclear Microprobe For Integrated Circuit Process Inspection, Mikio Takai, Ryoh Mimura, Hiroshi Sawaragi, Ryuso Aihara

Scanning Microscopy

A nuclear microprobe with a minimum beam-spot diameter of less than 100 nm, intended for application to IC (integrated circuit) process inspection, has been designed and installed at Osaka University. An ultra high-vacuum sample-chamber with a three-axis goniometer stage and a toroidal electrostatic analyzer for medium energy ion scattering (MEIS) was combined with a short acceleration column for a focused ion beam. A liquid metal ion source (LMIS) for light metal ions such as Li+ or Be+ was mounted on the short column. A minimum beam spot-size of about 80 nm with a current of 30 pA was …