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Recent Developments In Numerical Electron Optics, Erwin K. Kasper

Scanning Electron Microscopy

The familiar methods for the numerical calculation of fields in electron optical devices are outlined briefly. for the solution of self- adjoint elliptic differential equations in orthogonal curvilinear coordinate systems a favourable ninepoint discretization is worked out which can be applied favourably e.g. to spherical mesh grids. The field calculation in magnetic deflection systems by means of an integral equation method is also highly advantageous. The methods for the field calculation can be still more improved by means of suitable hybrid procedures.

A second and shorter contribution is concerned with ray tracing and aberrations. Some favourable numerically stable new forms …

Synthesis Of Electron Lenses, M. Szilagyi

Scanning Electron Microscopy

This paper is a review of different approaches to one of the most ambitious goals of Electron and Ion Optics: to produce elements and systems with prescribed first-order properties and minimal aberrations. Synthesis of such elements is usually done in two steps: the first is a search for a field distribution with the given properties and the second is the reconstruction of electrodes (pole pieces) that would produce this field distribution. The first problem can be solved by the use of different techniques: Calculus of Variations, Dynamic Programming or Function Minimization. The second one is more complicated and requires a …