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A Transport Equation Theory Of Electron Scattering, D. J. Fathers, P. Rez
A Transport Equation Theory Of Electron Scattering, D. J. Fathers, P. Rez
Scanning Electron Microscopy
The use of the Boltzmann transport equation to describe electron scattering in electron microscopy and electron probe microanalysis is discussed. A method of solution is given in which the transport equation is divided into angle and energy intervals. This gives rise to a number of coupled first order differential equations. Separation into forward and backward travelling components of the electron flux distribution enables the correct boundary conditions to be imposed. Solutions are derived which take the form of matrix operators analytic in both depth and target thickness. These matrices allow derivation of other physical quantities such as X-ray or Auger …
The Role Of The Background In Auger Electron Spectroscopy, H. E. Bishop
The Role Of The Background In Auger Electron Spectroscopy, H. E. Bishop
Scanning Electron Microscopy
In Auger Electron Spectroscopy (AES) the characteristic Auger peaks are superimposed on a relatively high continuum of back-scattered electrons. In the commonly used differential mode of recording Auger spectra, the influence of the background appears through its contribution to the noise and the enhancement of the Auger signal that makes a backscattering correction necessary in quantitative AES. With the increased use of low incident beam currents to achieve high spatial resolution, the direct spectrum is increasingly used, so that a better understanding of the background is desirable. In this paper the variations of the background with atomic number, incident beam …