Open Access. Powered by Scholars. Published by Universities.®
Articles 1 - 1 of 1
Full-Text Articles in Life Sciences
Effect Of Dry Oxidation And Thermal Annealing On Aln/Gan/Aln/Si (111) And Evaluation Of Its Electrical Characteristics, Mohd Zaki Mohd Yusoff, Azzafeerah Mahyuddin, Zainuriah Hasssan, Muhammad Syarifuddin Yahya
Effect Of Dry Oxidation And Thermal Annealing On Aln/Gan/Aln/Si (111) And Evaluation Of Its Electrical Characteristics, Mohd Zaki Mohd Yusoff, Azzafeerah Mahyuddin, Zainuriah Hasssan, Muhammad Syarifuddin Yahya
Makara Journal of Science
We proposed a technique for improving the platinum (Pt) Schottky contact dark current of the AlN/GaN/AlN/Si(111) substrate. The AlN/GaN/AlN/ heterostructure sample was successfully grown on a silicon substrate by radio frequency molecular beam epitaxy. The high quality of the interlayer heterostructure sample was verified by transmission electron microscopy (TEM). From the TEM image, a good quality single interface layer with spacing less than 1 nm was detected. The strong significant peaks obtained by X-ray diffraction measurement indicated that the sample has a high structural quality for each grown layer. Dry oxidation and thermal annealing were used in conjunction to effectively …