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Piezoresistive Properties Of Ito Strain Sensors Prepared With Controlled Nanoporosity, Otto J. Gregory, Tao You
Piezoresistive Properties Of Ito Strain Sensors Prepared With Controlled Nanoporosity, Otto J. Gregory, Tao You
Chemical Engineering Faculty Publications
A ceramic strain gage based on reactively sputtered indium-tinoxide (ITO) thin films is being developed to monitor the structural integrity of components employed in aerospace propulsion systems operating at temperatures in excess of 1500°C. The hightemperature stability and piezoresistive properties depend to a large extent on the thickness of the active ITO strain elements comprising these ceramic strain gages. Scanning electron microscopy of the thick ITO sensors revealed a partially sintered microstructure consisting of a contiguous network of submicrometer ITO particles with well-defined necks and isolated nanoporosity. It appeared that densification of the ITO particles was retarded during high-temperature exposure …