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A Semi-Empirical Model For Tilted-Gun Planar Magnetron Sputtering Accounting For Chimney Shadowing, Johnathan Bunn, C. Metting, Jason Hattrick-Simpers Mar 2015

A Semi-Empirical Model For Tilted-Gun Planar Magnetron Sputtering Accounting For Chimney Shadowing, Johnathan Bunn, C. Metting, Jason Hattrick-Simpers

Jason R. Hattrick-Simpers

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