Open Access. Powered by Scholars. Published by Universities.®
Articles 1 - 1 of 1
Full-Text Articles in Engineering
Micro-Contacts With 3-D Surfaces Made With Grayscale Lithography, Paul L.J. Michaud
Micro-Contacts With 3-D Surfaces Made With Grayscale Lithography, Paul L.J. Michaud
Theses and Dissertations
MEMS switches show advantages over FET transistors and PIN diodes for switching applications due to low contact resistance, high linearity, low power use, better isolation and lower insertion loss. The switches have not replaced FETs or PIN diodes due to perceived limitations in their reliability and the need for stable contact resistance. In order to create switches acceptable for industry applications, research on micro-contact physics and failure mechanisms of micro-contacts is necessary to develop durable contact surfaces. The aim of this research was to design and fabricate micro-contacts with three-dimensional surfaces using grayscale lithography. The goal was to create devices …