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Mechanical Response Of He- Implanted Amorphous Sioc/ Crystalline Fe Nanolaminates, A. Zare, Q. Su, J. Gigax, T. A. Harriman, M. Nastasi, L. Shao, D. A. Lucca

Nebraska Center for Energy Sciences Research: Publications

This study investigates the microstructural evolution and mechanical response of sputter-deposited amorphous silicon oxycarbide (SiOC)/crystalline Fe nanolaminates, a single layer SiOC film, and a single layer Fe film subjected to ion implantation at room temperature to obtain a maximum He concentration of 5 at. %. X-ray diffraction and transmission electron microscopy indicated no evidence of implantation-induced phase transformation or layer breakdown in the nanolaminates. Implantation resulted in the formation of He bubbles and an increase in the average size of the Fe grains in the individual Fe layers of the nanolaminates and the single layer Fe film, but the bubble …