Engineering Commons^™

Fabrication Of Highly Homogeneous And Controllable Nanogratings On Silicon Via Chemical Etching-Assisted Femtosecond Laser Modification, Ji Huang, Lan Jiang, Xiaowei Li, Andong Wang, Zhi Wang, Qingsong Wang, Jie Hu, Liangti Qu, Tianhong Cui, Yongfeng Lu

Department of Electrical and Computer Engineering: Faculty Publications

Femtosecond laser direct writing is widely exploited in surface periodic structures processing. However, this technique still faces challenges in obtaining high surface homogeneity and flexible morphology controllability. In this study, a flexible and efficient approach has been proposed to fabricate highly homogeneous and controllable nanogratings on silicon via chemical etching-assisted femtosecond laser modification. By precisely manipulating the laser-material interaction process, alternating amorphous-crystalline nanofringes are generated when employing femtosecond laser scanning over a Si sample, with almost no material removal. Following auxiliary chemical etching, highly homogeneous nanograting structures are obtained, and the morphology of the nanogratings can be flexibly managed through …