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Material Parameter Estimation Of Thin Wafers With Terahertz Time-Domain Spectroscopy, Kirk R. Jungles
Material Parameter Estimation Of Thin Wafers With Terahertz Time-Domain Spectroscopy, Kirk R. Jungles
Undergraduate Research & Mentoring Program
Terahertz Time Domain Spectroscopy(THz TDS) is a spectroscopic technique that can be implemented to perform non destructive material parameter extraction on a variety of materials. Accuracy of these material parameters is often limited by statistical variation between measurements and insufficient knowledge of the thickness of the slabs being measured.
The goal of this project was to develop an in house procedure that would allow us to perform THz TDS on thin wafers using an up to date signal processing algorithm that would provide accurate predictions for the thickness of the wafers, reliable estimations of the wafer’s material parameters, and demonstration …