Open Access. Powered by Scholars. Published by Universities.®
Articles 1 - 2 of 2
Full-Text Articles in Engineering
Interfacial Fluctuations In An Ideal Block Copolymer Resist, August Bosse, Eric Lin, Ronald Jones, Alamgit Karim
Interfacial Fluctuations In An Ideal Block Copolymer Resist, August Bosse, Eric Lin, Ronald Jones, Alamgit Karim
Alamgir Karim
We use field-theoretic computer simulations to show that intrinsic interfacial fluctuations may place limits on the use of block copolymer materials as resists for the nanofabrication of next-generation electronics devices. Even for an ideal system, our simulations demonstrate that the magnitude of the interfacial fluctuations is of the same order as the maximum interfacial roughness requirements noted in the International Technology Roadmap for Semiconductors. Furthermore, we show that the interfacial fluctuations exhibit an inverse power law dependence on the copolymer molecular mass, and we identify a peak in the interfacial fluctuation spectrum indicative of fluctuations with a wavelength of order …
Capillary Instability In Nanoimprinted Polymer Films, Kyle J. Alvine, Yifu Ding, Jack F. Douglas, Hyun Wook Ro, Brian C. Ockerberg, Alamgir Karim, Christopher L. Soles
Capillary Instability In Nanoimprinted Polymer Films, Kyle J. Alvine, Yifu Ding, Jack F. Douglas, Hyun Wook Ro, Brian C. Ockerberg, Alamgir Karim, Christopher L. Soles
Alamgir Karim
Capillary forces play an active role in defining the equilibrium structure of nanoscale patterns. This effect can be especially pronounced in soft materials such as polymers near or above their glass transition temperature (Tg) where material flow is possible. In these situations, the effect of surface tension can produce varied and complex capillary instabilities, even in relatively simple geometries such as parallel-line-space grating patterns. Here we investigate a novel capillary instability that arises upon thermal annealing of nanoimprinted polystyrene line-space gratings with an underlying residual layer. This novel instability is characterized by the development of lateral undulations of the lines, …