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Spectroscopic Ellipsometry And Absorption Study Of Zn1-Xmnxo/Al2o3 (0 <= X <= 0.08) Thin Films, Ghil Soo Lee, Ho Suk Lee, Tae Dong Kang, Hosun Lee, C. Liu, B. Xiao, Ü. Özgür, H. Morkoç
Spectroscopic Ellipsometry And Absorption Study Of Zn1-Xmnxo/Al2o3 (0 <= X <= 0.08) Thin Films, Ghil Soo Lee, Ho Suk Lee, Tae Dong Kang, Hosun Lee, C. Liu, B. Xiao, Ü. Özgür, H. Morkoç
Electrical and Computer Engineering Publications
We grow Zn1−xMnxO∕Al2O3 (0⩽x⩽0.08)thin films on sapphire (0001) using radio-frequency sputtering deposition method with Ar and various N2 flow rates. We examine the effect of N2 codoping on the band gap and Mn-related midgap absorption of (Zn,Mn)O. Using spectroscopic ellipsometry, we measure pseudodielectric functions in the spectral range between 1 and 4.5eV. Using the model of Holden et al. [T. Holden et al., Phys. Rev. B56, 4037 (1997)], we determine the uniaxial (Zn,Mn)O dielectric function and the E0 band-gapenergy. The fitted band gap does not change appreciably with increasing Mn composition up to 2%. We find a very large …