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Full-Text Articles in Engineering
Design And Fabrication Of On-Chip Inductors, Robert K. Requa
Design And Fabrication Of On-Chip Inductors, Robert K. Requa
Journal of the Microelectronic Engineering Conference
An inductor is a conductor arranged in an appropriate shape (such as a conducting wire wound as a coil) to supply a certain amount of self-inductance. This passive device stores magnetic energy. Simple spiral planar inductors of varying geometry were designed and fabricated on a silicon substrate insolated by silicon oxide. The process chosen for fabrication of the devices was the copper damascene process. Line widths and spaces varied from 5μm to 20μm. Thickness of the copper wire was approximately 1.5 μm. The inductors were isolated from the silicon substrate by 0.5 μm of Si02 and wires were insolated …
Design And Analysis Of A Cmos Based Mems Accelerometer, Matthew A. Zeleznik
Design And Analysis Of A Cmos Based Mems Accelerometer, Matthew A. Zeleznik
Journal of the Microelectronic Engineering Conference
Traditionally, microelectromechanical systems (MEMS) have been fabricated using standard surface micromachining or bulk micromachining processes with prior or subsequent CMOS incorporation. Recently, a new hybrid technique known as CMOS enicromachining has been developed allowing for parallel fabrication of mechanical and electrical components. A single axis and dual axis accelerometer have been designed for submission for an ASIMPS alpha run using the CMOS micromachining process. Electrical and mechanical analysis and simulations for the single axis accelerometer have been performed. The sensitivity of the single axis accelerometer has been calculated to be 19.66mV/g neglecting the effects of parasitic capacitance. The released die …