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Nanoporous Sio2/Vycor Membranes For Air Separation, Mihir Tungare

Theses

Porous Vycor tubes with 40Å initial pore diameter were modified using low pressure chemical vapor deposition (LPCVD) of silicon dioxide N0₂). Diethylsilane (DES) in conjunction with nitrous oxide (N₂O) was used as a precursor to synthesize these SiO₂ films. The aim of this study was to obtain a considerable selectivity between species of comparable size and hence N₂O was used. The use of N₂O was believed to make the process self-limiting. DES was allowed to flow through the tube and N₂O on the outside in the chamber at 550°C …