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Yttria Stabilized Zirconia Buffered Silicon: Substrates For Ybco Microwave Applications, Philip D. Brown

FIU Electronic Theses and Dissertations

The use Yttria-Stabilized Zirconia (YSZ) as a buffer layer for YBa₂Cu₃O_7-x (YBCO) thin films on (100) silicon (Si) substrates is investigated. YSZ was grown using on-axis pulsed D.C. (PDC) and R.F. magnetron sputtering from a 99.9% pure YSZ target [(Y₂O₃)_0.08(ZrO₂)_0.92]. Sputtering was carried out in Argon/Oxygen atmosphere at total pressures ranging from 6 to 320 mTorr containing 0.1 to 10% Oxygen. Substrate temperatures were varied from 300° C to 900° C. (111), (100) and mixed (100) and (111) oriented YSZ films were produced …