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Nanostructured Columnar Thin Films Using Oblique Angle Deposition: Growth, Sers Characterization And Lithographic Processing, Piyush J. Shah

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Oblique angle physical vapor deposition technique has led to the evolution of new class of nanostructured thin films. These films posses' novel anisotropic electrical, magnetic, optical, properties which could be potentially engineered based on the growth conditions and the deposition parameters. The technique is based on the atomistic level self-shadowing principle. In the oblique angle deposition (OAD) technique, the substrate is held at an oblique angle with respect to the incoming vapor flux. As the vapor atoms condense and nucleate on the substrate, the shadowed regions behind each site stop receiving the subsequent vapor atoms. Instead, they land on the …