Engineering Commons^™

Finite Element Analysis Simulations Of Micro And Nano-Electromechanical Sensors For Design Optimization, Nicholas Frank Deroller

Theses and Dissertations

Micro and Nano-electromechanical sensors (MEMS and NEMS) provide a means of actively sensing minute changes in the surrounding environment. Small changes in temperature, momentum, and strain may be sensed in passive modes while greater sensing possibilities exist in active modes. Theoretical femto-gram resolution mass detection and heated element sensing methods may be used while volatile organic compound (VOC) sensing may be achieved when combined with a functionalization layer or device heating. These devices offer a great reduction in cost and offer increased mobility by allowing a "lab-on-chip" solution for the prospective user while also greatly reducing the amount of energy …

Piezotransistive Iii-V Nitride Microcantilever Based Mems/Nems Sensor For Photoacoustic Spectroscopy Of Chemicals, Abdul Hafiz Ibne Talukdar

Theses and Dissertations

Microcantilevers are highly attractive as transducers for detecting chemicals, explosives, and biological molecules due to their high sensitivity, micro-scale dimensions, and low power consumption. Though optical transduction of the mechanical movement of the microcantilevers into an electrical signal is widely practiced, there is a continuous thrust to develop alternative transduction methods that are more conducive to the development of compact miniaturized sensors. Piezoelectric and piezoresistive transduction methods are two of the most popular ones that have been utilized to develop miniaturized sensor systems. Piezoelectric cantilevers, which are commonly made of PZT film, have demonstrated very high sensitivity; however, they suffer …

Quartz-Mems: Wet Chemical Etching Assisted By Electromagnetic Energy Sources For The Development Of Quartz Crystal To Be Used For Microelectromechanical Systems, William J. Clower

Doctoral Dissertations

Quartz crystal resonators have been the most commonly used timing devices to date. Today's timing market requires devices to be as small as possible and consume smaller amounts of energy. Because of the market demand, many startup companies have formed to develop silicon resonators as timing devices. Silicon resonators have poor noise and temperature performance (due to its linear temperature versus frequency coefficient). At the moment the only advantage that silicon resonators have over quartz crystal resonators is a small form factor. The photolithography processing method currently being used in industry is a very tedious task, requiring multiple etching steps …

Development Of Electroplated-Ni Structured Micromechanical Resonators For Rf Application, Mian Wei

USF Tampa Graduate Theses and Dissertations

On-chip vibrating MEMS resonators with high frequency-Q product on par with that of the off-chip quartz crystals have attracted lots of attention from both academia and industry for applications on sensing, signal processing, and wireless communication. Up to now, several approaches for monolithic integration of MEMS and transistors have been demonstrated. Vibrating micromechanical disk resonators which utilize electroplated nickel as the structural material along with either a solid-gap high-k dielectric capacitive transducer or a piezoelectric transducer have great potential to offer unprecedented performance and capability of seamless integration with integrated circuits.

Despite the frequency drift problems encountered in early attempts …

Flexible Mems: A Novel Technology To Fabricate Flexible Sensors And Electronics, Hongen Tu

Wayne State University Dissertations

This dissertation presents the design and fabrication techniques used to fabricate flexible MEMS (Micro Electro Mechanical Systems) devices.

MEMS devices and CMOS(Complementary Metal-Oxide-Semiconductor) circuits are traditionally fabricated on rigid substrates with inorganic semiconductor materials such as Silicon. However, it is highly desirable that functional elements like sensors, actuators or micro fluidic components to be fabricated on flexible substrates for a wide variety of applications. Due to the fact that flexible substrate is temperature sensitive, typically only low temperature materials, such as polymers, metals, and organic semiconductor materials, can be directly fabricated on flexible substrates. A novel technology based on XeF2(xenon …