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Design, Modeling And Fabrication Of Shear Mode Bulk Acoustic Wave Sensor As A Potential Biosensor, Chi-Jung Cheng

Dissertations

There has been an increasing interest in development of thin film bulk acoustic wave resonator (FBAR) devices for chemical and biological sensing applications in the environmental and biomedical industries. The zinc oxide (ZnO) thin film based FBAR devices provides attractive advantages, such as high resonant frequency, small size, and rapid response. Typically, the ZnO-based FBAR devices are operated in the longitudinal wave mode where the ZnO crystallites are perpendicular to the substrate. In gaseous environments, the longitudinal mode FBAR device provides high sensitivity for mass sensing. However, the longitudinal wave mode is adversely affected when used in liquid environments because …