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A Hybrid Finite Element-Finite Difference Method For Thermal Analysis In A Double-Layered Thin Film, Teng Zhu

Doctoral Dissertations

Thin film technology is of vital importance in microtechnology applications. For instance, thin films of metals, of dielectrics such as SiO2, or Si semiconductors are important components of microelectronic devices. The reduction of the device size to the microscale has the advantage of enhancing the switching speed of the device. The reduction, on the other hand, increases the rate of heat generation that leads to a high thermal load on the microdevice. Heat transfer at the microscale with an ultrafast pulsed-laser is also a very important process for thin films. Hence, studying the thermal behavior of thin films or of …