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Investigation Of Paraelectric Ptl Thin Films Using Reactive Magnetron Sputtering, Hyun Hoo Kim

Dissertations

The study of methods to prepare paraelectric perovskite PLT (Pb_1-xLa_xTi_1-x/4O₃; x=0.28) thin films has been important because thin films of this high dielectric strength material are required to make high density capacitors for dynamic random access memory. In this research, paraelectric PLT thin films were prepared on multi-layer (Pt/Ti/SiO₂/Si) and MgO substrates in a unique way by the reactive magnetron sputtering method using a multi-component metal target. The individual control of each metal area on the sputtering target had considerable influence on the stoichiometry and electrical properties of the thin …