Engineering Commons^™

Fabrication Of Mwcnt Based Gas Sensor Using Site-Selective Growth Of Nanotubes On Gold Patterned Silicon Oxide Substrate, Srikanth Durgamahanty

University of Kentucky Master's Theses

Growth confinement techniques for multi walled carbon nanotubes on Au/SiO₂ surfaces was studied and incorporated into a gas sensor design. A device framework was conceived and a sensor was built to achieve this structure. The fabrication results were analyzed using scanning electron microscopy which confirmed the achievement of highly site-selective growth of carbon nanotubes, exclusively between the interdigitated electrodes. The sensor was then evaluated for its capacitance and conductance response when exposed to NO₂ gas. Variation in sensitivities with frequency and flow rate were analyzed. A mathematical model was derived for such a device structure and the predictions …