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Synthetic Aperture Optical Imaging Interferometric Microscopy With Improved Image Quality, Preyom K. Dey
Synthetic Aperture Optical Imaging Interferometric Microscopy With Improved Image Quality, Preyom K. Dey
Electrical and Computer Engineering ETDs
The resolution limit of optical microscopy can be extended by using Imaging Interferometric Microscopy (IIM), which uses a low numerical aperture (NA) objective lens to achieve resolution equivalent to that of a high-NA objective lens with multiple sub-images. Along with the resolution enhancement challenge, IIM often suffers from poor image quality. In this dissertation, several image quality improvement methods are proposed and verified with simulation and experimental results. Next, techniques to extend the resolution limit of IIM to ≤ 100nm using a low-NA objective lens are demonstrated. An experimental technique of using a grating coupler on …